The Engineering Research Center Clean Room is a central fabrication, processing, and characterization center intended to be used by a diverse campus wide research community. The more than 8000 square foot facility includes areas of class 10, 100, 1000, and 10,000 clean room spaces. It includes lithography, deposition, etching, oxidation, diffusion, and characterization tools, some of which are featured above. The newest arrival to the facility is the Raith 150 E-Beam Lithography tool that enables researchers to direct write pattern sub 100 nm features for nano-scale device fabrication. A sample of specific nano-scale projects are highlighted in the boxes below.

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