Equipment


	ERC Clean Room - Equipment

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The equipment in the ERC Clean Room is for Microelectronic, Nanoelectronic, and MEMS fabrication and characterization. Below is a list of the equipment represented in the clean room and a link to a more complete description of the tools.

Schedule Online	EQUIPMENT
Schedule	Raith 150 E-Beam Lithography Tool
Schedule	Solitec Mask Aligner
Schedule	Denton 502 Thermal Evaporator
Schedule	Mechel Wire Bonder
Schedule	Amray 1600 LaB6 SEM
Schedule	March CS1701 RIE
Schedule	Karl Suss MJB3 Mask Aligner
Schedule	Nanosurf AFM
Schedule	KLA Profilometer
Schedule	Parylene Coater
Schedule	AG Associates RTA
Schedule	Technics RIE
Contact Ron	Electromask Pattern Generator and Image Repeater
Contact Ron	Plasma Therm Versaline ICP

Schedule Online

EQUIPMENT