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FORMS:

     Chemical request (PDF 7Kb)
     Training request (PDF 7Kb)
     Raith 150 Trainging Request Form (PDF 7Kb)
     Space request (PDF 7Kb)
    

Accessing the ERC Clean Room

The ERC Clean Room is a University facility that encourages use from all colleges and departments on campus as well as other academic and industrial users. To gain access to the facility one needs to complete the ERC Clean Room safety course as well as the OSHA online Hazardous Communications training courses. The completion of these and possessing appropriate personnel protective equipment will allow access to the laboratory facility. Additional training is required to use a majority of the facility equipment.

Scheduling:

     Raith 150 E-Beam Lithography
     Solitech Mask Aligner
     Temescal FC1800 E-Beam Evaporator
     Amray 1600 LaB6 SEM
     March CS1701 RIE
     Denton 502 Thermal Evaporator
     Mechel Wire Bonder
     KLA P-10 Profilometer
     Karl Suss MJB3 Mask Aligner
     Nanosurf AFM
     Parylene Coater
     AG Associates RTA
     Rudolph El III Ellipsometer
     Technics RIE