Resources
The Institute researchers have access to outstanding experimental resources, including the UC Nanofabrication Facility and the Advanced Materials Characterization Center, both located in the new University of Cincinnati Engineering Research Center.
The Engineering Research Center Clean Room (www.eng.uc.edu/erccleanroom/) is a central fabrication, processing, and characterization center intended to be used by a diverse campus wide research community. The more than 8000 square foot facility includes class 10, 100, 1000, and 10,000 clean room spaces, with lithography, deposition, etching, oxidation, diffusion, and characterization capabilities. The newest arrival to the facility is the Raith 150 E-Beam Lithography tool that enables researchers to directly write pattern sub-100 nm features for nanoscale device fabrication. For further information contact:
Robert Jones or Jeff Simkins
Microelectronics Engineers
The University of Cincinnati
390 ERC
(513) 556 - 4775
http://www.eng.uc.edu/erccleanroom/
jonesra@ececs.uc.edu simkinjr@email.uc.edu
The Characterization Center houses a full range of research instruments:
- High resolution Hitachi scanning electron microscope (SEM)
- FEI environmental SEM
- Phillips transmission electron microscope
- Phillips X-ray diffractometer
- Atomic force microscope
- Phillips, Cambridge, and JEOL SEMs
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